Laser Surface Micro/Nano Texturing Using Imaging Projection by Particle Lens Array

Abstract

The viability of projecting a macroscopic image into millions of nano-scale structures is a step forward in nanofabrication and development. A scheme at reproducing arrays of small repeated structures by the projection of a macroscopic image (square mask) into millions of nano structures through the application of an ordered array of particle lens is presented. With this technique, well arranged patterns with aggregate features size smaller than 300 nm can be achieved. Feature size reduction of approximately 104 in one step is attainable. From the result obtained, the object distance affects the laser fluence with regards to the sample type and the particle (SiO2) size could effectively determines the patterned shape dimensions.